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COM2) - MODBUS interfaces
200mA maximum
repeatable film thickness profiles across the substrate
Terminal-based linearity: ±0
EPRO MMS 6312 | MMS6312 | Dual Channel Rotational Speed Monitor Ethernet Remote I/O Drop Adapter Module COM2) - MODBUS interfacesOverview The EPRO MMS 6312 is a dual channel rotational speed monitor designed for precise measurement and monitoring of rotational speed using various pulse sensors. Technical Specifications Sensor Inputs: Two independent differential inputs for pulse sensors, compatible with EPRO's eddy current type sensor systems PR 6422 . to PR 6425 .., PR 9376 , PR 6453 , or any other matching sensor system. Available Sensor Supply: Each of the two sensor input
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